Infrastructure

Supercomputer "VU HPC Saul臈tekis" cluster BullX 500

85 computing nodes.

Supercomputer "VU HPC Saul臈tekis" cluster BullX B510

54 computing nodes.

Supercomputer "VU HPC Saul臈tekis" cluster BullSequana X1000 GPU

2 GPU computing nodes.

Supercomputer "VU HPC Saul臈tekis" cluster BullSequana X1000

Distributed memory cluster.

HPC high performance computing

HPC High Performance Computing Cluster.

31/51 cm Maksutov-system Mol臈tai Astronomical Observatory telescope

The telescope is designed for photometric and asteroseismic observations of stars, searches and observations of asteroids and comets.

Mol臈tai Astronomical Observatory 1.65 m telescope

The telescope is designed for high-resolution spectroscopic, photometric and asteroseismic stellar observations.

Automated system "Evos FL" for analysis of cell images

Automated cell visualization system for observation, recording and analysis of cell and tissue sections.

Complex of the femtosecond Ti:sapphire laser

Laser is suitable for studies of laser radiation and mater interaction, research of nonlinear optical processes, generation of THz radiation, laser damage threshold tests and testing of commercial nonlinear optical devices.

Shimadzu UV-3101PC spectrophotometer

Spectrophometer is suitable for measurement of various optical samples spectral characteristics (transmission, absorption, reflection).

Light Conversion femtosecond laser system Pharos

6W average power diode-pumped high repetition rate femtosecond Yb:KGW laser. Maximum repetition rate is 200 kHz. Central wavelength 1030 nm, pulse duration 300 fs, pulse energy to 0.4 mJ.

Facility of ultrashort pulses research

Facility is suitable for analysis of ultrashort pulses and light beams self-action processes in transparent materials.

Hitachi Tabletop electron microscope TM-1000

Accelerating Voltage 15 kV, maximum magnification 10000, maximum sample size 70 mm in diameter, maximum sample height 20 mm, detector 鈥� backscattered electron detector (BSE).

Optical profilometer Sensofar PL渭2300

Profilometer is suitable for topographic analysis of different sample surface.

Ultrafast spectroscopy facility

Facility is suitable for ultrafast spectroscopy, investigation of nonlinear optical interactions, laser radiation and materials interactions.

Aerotech mid motion five coordinates precision positioning module with unique set of equipment and diagnostic and Light Conversion femtosecond Yb:KGW laser Pharos

Module is suitable for microfabrication, investigation of femtosecond laser radiation and material interaction.

Optical microscope Olympus BX51, Qimaging CCD camera microPublisher 5.0

Microscope is suitable for different sample morphology observation and image registration.

NIR fiber optic spectrograph AvaSpec-NIR256-2.5

InGaAs detector, spectral range: 1000-2500 nm.

Andor Technology imaging spectrograph Shamrock SR-500i for broad spectral range and CCD camera iXon 885

Spectrograph has two sets of three optical gratings. Spectral range: 150 鈥� 30.000 nm, resolution 0.1 nm in the visible spectral range. CCD camera spectral range: 400-1100 nm.

XUV detection set

The set consists of: 1) XUV detection and registration system. Spectral range is 1-310 nm, resolution 0.1 nm. 2) Vacuum chamber with a pump. Inner chamber dimensions are 610脳810脳175 mm. The pressure is maintained in the 1x10-7 - 1000 mbar range.

Facility of high intensity

Facility consists of: 1) Light Conversion femtosecond Yb:KGW oscillator with amplifier Pharos 6W average power diode-pumped high repetition rate femtosecond Yb:KGW laser. Maximum repetition rate is 200 kHz. Central wavelength 1030 nm, pulse duration 300 fs.

Equipment for isothermal titration calorimetry and quantitative Real-time amplifyer

Equipment is for the determination of protein stability and interaction with chemical substances.

Equipment for evaluation of hormone concentration in saliva

Equipment for evaluation of hormone concentration in saliva is used to determine concentration of sex steroid hormones in saliva.

Eye movement recording device

Eye movement recording device is designed for complex psychophysical studies of visual system.

Visual stimulus generator

Visual stimulus generator used in studies on visual system for generation and presentation of visual stimulation.

Computerized psychological test kit

Computerized psychological test kit for psychological testing in computerized form.

Electroencephalograph

64-channel electroencephalograph is used in recording and analysis of human brain electrical signals.

Platform for a high throughput analysis of bacterial pathogens

Platform for a high throughput analysis of bacterial pathogens which consists of robotic system for setting up PCR reactions, workstations for automatic DNA isolation, high capacity PCR devices, system for pulsed field electrophoresis.

Liquid chromatography system 鈥濧KTA AVANT 25"

Liquid chromatography system is designed for purification of big quantities of proteins and nucleic acids.

High capacity PCR preparation and dispensing system QIAgility

The system QIAgility is a compact benchtop instrument that enables rapid, high-precision PCR setup

X-ray diffractometer for macromolecular and chemical crystallography

Allows to determine three-dimensional structures of biological macromolecules and small organic molecules if the sample is available in a single crystal form.

System for crystal growth and observation

The system for crystal growth allows to accelerate and automate processes of crystal growing and observation.

Bioreactor

Bioreactor with continuous flow centrifuge and steam generator.

Laminair safety cabinet ESCO

The device is used to work with hybridomas and other mammalian cell cultures.

Liquid chromatography mass detector Agilent 6410 Triple Quadrupole

The device performs an initial effective characterization analysis of biomolecules and synthetic organic compounds by chromatographic and capillary electrophoresis.

Genetic Analyser 3130xl

The Applied Biosystems 3130xl Genetic Analyzer 16-capillary automated DNA sequencer that yields 700 to 1000 bases per template. It performs cycle sequencing reactions using fluorescent dye terminators ABI Big Dye庐 Terminator v3.1 on any kind of DNA (plasmid, phage or PCR product) provided by the users.

532 nm continuous wave solid state laser, Cobolt AB

The laser used for Raman spectroscopic measurements.

457 nm continuous wave solid state laser, Cobolt AB

The laser used for Raman spectroscopic measurements.

405 nm continuous wave diode laser, DL 405-040-SO, CrystaLaser

The laser used for Raman spectroscopic measurements.

266 nm continuous wave solid state laser, FQCW-266-100, CryLas GmbH

The laser is used for Raman spectroscopic measurements.

UV and visible wavelength region diode pumped solid state laser, NT242-SH/SFG/DUV-SCU, EKSPLA

The laser is used in a resonant Raman spectroscopy with different impulse laser wavelenght.

Raman microscope system, LabRam HR800, Horiba Jobin Yvon

The microscope is used for spectroscopic measurements.

Atomic force microscope, Dimension Icon, Bruker AXS

The atomic force microscope is used for nanometric analysis of biomolecule and cell surfaces, for single-biomolecule and single-cell manipulations and to study their properties.

Vertical micropipette puller, P-30 Sutter Instrument

The system is used to produce micropipettes and capillaries with the tips of up to 0.3 mm thick and 6-10 mm long.

Contact angle measuring system EasyDrop, Kruss GMBH

The equipment is used to evaluate hydrophilicity / hydrophobicity of surfaces.

Langmuir-Blodgett deposition trough, KSV NIMA Small, Biolin Scientific

The equipment is used to produce nanometric layers from amphiphilic molecules.

Spin coater, WS-650-23NPP, Laurell

The equipment is used to cover various surfaces by the rotating thin layer coating method.

Surface plasmone resonanse biosensor combined with potentiostat SPR Twingle, Metrohm Autolab

The equipment is used to study protein-ligand association, interaction of proteins (peptides) with phospholipid membranes and adsorbtion of biomolecules.

Thin film deposition system, KJLC PVD 75, Kurt J. Lesker Company LtD

The equipment is used for magnetronic deposition of metals (chromium and gold) on various film thickness under pressure control.

Sample preparation kits

The equipment is used for sample preparation and analysis

Mass spectrometers and liquid chromatographers systems for proteomics analysis (MALDI TOF/TOF, Qtrap4000, Higher Definition Mass Spectrometer Synapt G2)

Proteomics Center at 91桃色 Institute of Biochemistry is dedicated to perform proteomics analysis starting from sample preparation by 1D and 2D electrophoresis as well as chromatography and subsequent mass spectrometry protein identification and quantitation.

Portable analyzer Multi Line F/Set 3

Device is suitable for physico-chemical water analysis.

Inductively coupled plasma optical emision spectrometer Perkin Elmer Optima 7000 DV

Spectrometer is suitable for chemical water analysis.

Ion chromatography system Dionex ICS 鈥� 5000

System is suitable for chemical water analysis.

Water stream, discharge and river profile measurer 鈥濺iverSurveyor M9鈥�

Using 鈥濺iverSurveyor鈥�, multiple acoustic frequencies are fused with precise bandwidth control for the most robust and continuous shallow-to-deep discharge measurements ever.

Solar radiation sensor system (KIPP & ZONEN)

Solar radiation sensor system is an integral part of stationary meteorological station.

Stationary meteorological station

This is a unique meteorological station, the only one in Lithuania, measuring all the complex of meteorological parameters in the city.

Atomic force microscope (BioScope, Bruker)

The device is designed to visualise surface irregularities and to measure mechanical properties, such as hardness. The measurement is performed by scanning a sample using a nano size needle.

Scanning near-field optical microscopy eqipment (Alpha300R, WiTec)

Scanning near-field optical microscope (SNOM) is integrated with an optical microscope (resulting in a reflection image), a Raman microscope (532 nm excitation source), and an atomic force microscope.

Mass spectrometer (6230TOF Agilent) with add-ons

Determination of the exact molecular mass of organic compounds, analysis of mixtures with TOF mass spectrometer.

A kit for analysis of elemental composition of organic materials Flash2000 (Flash2000 analyzer, analytical scales)

Determination of CHNS (burning) elemental composition of organic compounds. Determination of O (pyrolysis) elemental composition of organic compounds.

Nuclear magnetic resonance (NMR) spectrometry equipment Bruker AVANCE 400 WB and Bruker AVANCE 400 SB

Working frequency 400 MHz for samples that are dissolved in deuterated solvents.

Inductively coupled plasma's optical emission spectrometer Optima 7000 DV, Perkin Elmer

Spectrometer is suitable for quantitative analysis of metals, certain semi-metals and non-metals.

Atomic absorption spectrometer Perkin Elmer AAnalyst 800

Device is suitable for quantitative determination of metals.

Quadrupole time of flight mass spectrometer (q-TOF)

Device is suitable for very precise determination of the molecular mass of organic compounds.

High-performance liquid chromatograph with DAD detector, triple quadrupole and ion trap mass spectrometers

Device is suitable dor quantitative analysis of organic compounds, determination of purity of materials.

FTIR spectrometer Bruker Alpha

Spectrometer is suitable for FTIR and MIR measurements of various samples: liquids and solids.

FTIR spectrometer Perkin Elmer Frontier

Mini FTIR spectrometer with ATR accessory.

Scanning Electronic Microscope (SEM) Hitachi TM3000

Table scanning electronic microscope with EDS detector.

UV-Vis-NIR Spectrophotometer Cary5000 (Agilent)

Device is suitable for measurement of transmittance spectra of various samples in 200-3200 nm range.

X-ray diffraction (XRD) instrument MiniFlex II, Rigaku

Diffraction (XRD) instrument i suitable for determination of the crystallographic structure (composition) of the powder.

Spectrofluorimeter Edinburgh Instruments EI FLS 980

Precision measuring equipment for measuring fluorescence spectra of samples.

Plasma cleaning equipment (Diener, plasma system type "Nano")

Device is suitable for surface cleaning / activation using various gas plasma.

Spin-coating system WS-650Hz-8NPP (Laurell)

Device is suitable for formation of various coatings using spin-coating technique. All processes are program-controlled.

Cabinets for synthesis in an inert atmosphere (GP Concept T2, Jacomex and UNIlab Pro, Mbraun)

It is possible to carry out the synthesis in special inert atmosphere cabinets.

Thermal analysis equipment including differential scanning calorimetry and thermogravimetry (Perkin Elmer (TGA/DSC) STA6000, Perkin Elmer (TGA) Pyris1, together with GS/MS Clarus 600T

Device is suitable for thermogravimetric and differential scanning calorimetry measurements of the samples.

X-ray diffractometer (XRD) Bruker D8 Advance

Diffractometer goniometer: vertical Theta / 2Theta or Theta / Theta; Bragg-Brentan and the source of parallel ray geometry with Cu K伪.

Scanning electron microscope (SEM) Hitachi SU-70 with Energy-Dispersive X-ray (EDX) and Electron Backscatter Diffraction (EBSD) measurement accessories

Scanning electron microscope for morphological and structural studies of surface of various solids (surface imaging and visualization).

Vibro viscometer SV-10, A&D

Viscosity is measured by evaluating vibrations of the sensor system.

Tensile test system MultiTest 1-i, Mecmesin

Tensile and compression testing system for force measurements up to 1 kN.

Lyophilizer Christ Alpha 2-4 LSC, Martin Christ

The device is designed for drying substances by freezing their solutions in very low temperatures and subliming the solvent in a deep vacuum.

Reaction calorimeter SuperCRC 208-110, Omnical

The device measures the amount of heat that is released (absorbed) during the reaction and after mixing the solutions.

Raman spectrometer Raman Station 400F, Perkin Elmer

The device is designed for registering Raman spectra. In situ studies (in a reaction vessel) are possible.

BET Surface area analyzer TriStar II 3020, Micromeritics

The instrument is designed for surface area and porosity analysis.

Differential scanning calorimeter DSC 8000, Perkin Elmer

The device is used for registering energy, which is needed to maintain temperature both in sample and standard material, when samples are heated or cooled..

Tensiometer BP100 and K100/MK2, Kruss GmbH

Tensiometer system for assessing the fluid surface and interphase layer properties.

Nanoparticle size and zeta potential measurement system Zetasizer Nano ZS, Malvern

Dynamic light diffusion device with a laser electrophoresis device and an autotitrator.

Molecular sieve chromatograph Viscotek TDAMax, Malvern

Chromatograph is suitable for determination of the average molecular weight of polymers, their distribution, solution limiting viscosity, the size and conformation of macromolecules.

High-repetition frequency tunable Pharos-SP femtosecond laser system with the Orpheus / Lyra parametric amplifier

System is suitable for laser nanophotonics research.

Technological system for the formation and processing of polymeric layers

System is suitable for laser nanophotonics research.

Precision three-coordinate positioning system with a galvanometric beam control subsystem

Device is suitabe for laser nanophotonics research.

Femtosecond laser micro-fabrication set

Set is suitable for precise microfabrication of various materials: metals, glasses, semiconductors.

Single longitudinal mode nanosecond Nd:YAG laser

Laser is suitable for characterization of optical coatings.

Laser-induced damage threshold (LIDT) test station No.2 (for 1 Hz to 10 kHz)

Test station is suitable for characterization of optical coatings.

High-energy nanosecond laser (Inolas SpitLight Hybrid III) with single longitudinal and transversal mode and 2-5 harmonics generation unit

Laser is suitable for characterization of optical coatings.

Laser-induced damage threshold (LIDT) test station No.1 (for 1 Hz to 100 kHz)

Test station is suitable for characterization of optical coatings.

Total integrated scattering test station with nanosecond Nd:YAG laser (Ekspla NL202)

Station is suitable for the evaluation of total integrated scattering from the whole surface and surface roughness of different optical elements (mirrors, filters, optical substrates, radial polarization converters), which are designed for 1064 nm, 532 nm and 355 nm laser radiation).

Optic spectrum analyzers Q8341, Q8384

Analyzers is suitable for optical radiation research of various sources.

Agilent N9020A MXA signal and spectrum analyzer

Analyzer is suitable for phase noise measurement in wide range of frequencies.

Automatic system of microwave impedance tuners for measuring noise and power parameters

System is designed for measuring noise and power parameters of microwave devices up to 50 GHz.

Low frequency noise measurement system

System si suitable for electrical and optic noise and signal testing of electronic and optoelectronic devices in 10 Hz - 26,5 GHz frequency range.

Sun radiation simulator Newport 96000

Simulator suitable for solar cell characterization.

Optical cryostat for electric measurements in vacuum Oxford instruments Optistat DN-V, vacuum pump set Pfeiffer HiCube Eco

Device is suitable for charge carrier extraction by linearly increasing voltage (CELIV, photo-CELIV, injected CELIV), time of flight method (TOF), double injection method (DoI), solar cell characterization, determination of main parameters of transistor structures.

High-power picosecond Nd:YAG laser with second and third harmonic crystals, optical table Ekspla PL2251-10 (SH/TH), Standa 1HT10-24-20

Device is suitable for charge carrier extraction by linearly increasing voltage (photo-CELIV), time of flight method (TOF).

Delay length generator BNC 575

Generator is suitable for charge carrier extraction by linearly increasing voltage (photo-CELIV), time of flight method (TOF).

Functional / freely selectable pulse shape generator Tektronix AFG3022B

Generator is suitable for charge carrier extraction by linearly increasing voltage (CELIV, photo-CELIV, injected CELIV), time of flight method (TOF), double injection method (DoI).

Functional / freely selectable pulse shape generator Tektronix AFG3011

Device is suitable for charge carrier extraction by linearly increasing voltage (CELIV, photo-CELIV, injected CELIV), time of flight method (TOF), double injection method (DoI).

Two-channel current, voltage source - meter Keithley 2602A

Device is suitable for solar cell characterization, determination of main parameters of transistor structures.

Optical radiation power meter 鈥� Newport 1918-R with detector 818E

Device is suitable for Ccharge carrier extraction by linearly increasing voltage (photo-CELIV), time of flight method (TOF)

Monochromator with light source Newport Cornerstone 260 录 m with Apex Arclamp Source 200W Hg(Xe)

Device is suitable for solar cell characterization.

Electrical signals amplifier - Thorlabs HVA 200

Amplifier is suitable for charge carrier extraction by linearly increasing voltage (CELIV, photo-CELIV, injected CELIV), time of flight method (TOF), double injection method (DoI).

Oscilloscope Tektronix DPO 4054B

Oscilloscope is suitable for charge carrier extraction by linearly increasing voltage (CELIV, photo-CELIV, injected CELIV), time of flight method (TOF), double injection method (DoI).

Oscilloscope Tektronix DPO 4104B

Oscilloscope is suitable for charge carrier extraction by linearly increasing voltage (CELIV, photo-CELIV, injected CELIV), time of flight method (TOF), double injection method (DoI).

FTIR spectrometer Vertex 80v

Device is suitable for measurement of the complex passage coefficient of thin dielectric plates.

Automated diffraction grating Raman spectrometer DFS12 with Argon laser Stabilite

Device is suitable for recording of Raman spectra of samples, using argon ion laser radiation of 488 nm and 514,5 nm for excitation; qualitative and quantitative analysis.

FT-Raman spread spectrometer Multiram

Device is suitable for recording of Raman spectra of fluorescent samples, using NIR lasers at 785 nm and 1015 nm for excitation; qualitative and quantitative analysis of fluorescent specimens.

FTIR spectrometer IFS 113 with closed-cycle helium cryostat

Device is suitable for: recording of high-resolution IR absorption spectra of gas samples; recording of IR absorption spectra of samples isolated in inert matrixes; analysis of IR absorption spectra of gas samples and samples isolated in inert matrixes.

FTIR spectrometer Alpha

Spectrometer is suitable for recording of ATR spectra of solid and liquid samples; qualitative and quantitative analysis of solid and liquid samples.

FTIR spectrometer Vector 22

Spectrometer is suitable for recording of permeability (absorption) spectrum of liquid samples and qualitative and quantitative analysis of liquid samples.

FTIR spectrometer Vertex 70 with IR microscope Hyperion

Device is suitable for chemical visualization of various surfaces.

Ultraviolet-visible spectrometer Lambda-1050

Spectrometer is suitable for recording of the reflection and absorption spectra of liquid and solid samples in the wide spectral range (170-3300 nm) and determination of reflection coefficients of mirror coatings.

High resolution terahertz spectrometer

Spectrometer is suitable for gas and molecular formation spectroscopy.

Terahertz spectrometer

Spectrometer is suitable for measurements of the complex passage coefficient of thin dielectric plates.

Scalar analyzer Elmika R2400 kit (3 units)

Analyzer is suitable for measurement of scalar reflection and passage coefficients of various radio circuits and weakly conductive samples.

Vector chain analyzer Agilent E8363B

Analyzer is suitable for measurement of complex reflection and passage coefficients of samples or various radio circuits.

Vector chain analyzer Agilent 8714ET

Analyzer is suitable for measurement of complex reflection and passage coefficients of samples or various radio circuits.

LCR meter HP4184A (2 units)

Meter is suitable for full impedance, conductance, capacitance, inductance and the corresponding loss tangent measurements of the samples.

Solatron FRA1250 + dielectric measurement accessory Solatron 1296

Device is suitable for measurement of full impedance of the samples.

Electron paramagnetic resonance (EPR) spectrometer Bruker X-Band CW/FT EPR Elexys 580

EPR spectrometer, capable of operating in pulse Fourier Transform (FT) and Continuous Wave (CW) modes.

Nuclear magnetic resonance (NMR) spectrometry complex Bruker AVANCE 400 WB and Bruker AVANCE 400 SB

Complex operating frequency 400 MHz, 2 superconducting wide and standard cavity magnets, electronic components that provide the possibility to research independent (parallel) solids and fluids.

Hyped-sounding and dynamic diffraction grating test stand

Stand suitable for measurement of key electrical parameters like carrier diffusivity, mobility, lifetime, surface recombination velocity, using conventional pump-probe and know-how transient grating techniques.

Instrument VUTEG-3 for the in situ and distant scans of the hadron irradiation induced changes of carrier recombination and trapping parameters within particle accelerator area

Instrument VUTEG-3 is designed and fabricated at VU for contactless and distant measurements of the microwave probed photoconductivity transients.

HERA 鈥� DLTS System FT 1030 spectrometer

HERA 鈥� DLTS System FT 1030 spectrometer is designed for deep level transient spectroscopy (DLTS) of radiation and technological defects.

The instrument BELIV-VU for barrier evaluation in the junction structures by using pulsed linearly increasing voltage

The BELIV-VU instrument is made at 91桃色 and consists of pulsed generator of the linearly increasing voltage of a type RIGOL DG1022, an oscilloscope of a type Agilent Technologies DS05032A and PCB for sample mounting.

Temperature scanner of the current-voltage and capacitance-voltage characteristics

Computer controlled temperature scanner of the current-voltage and capacitance-voltage characteristics, produced at Vilnius university, measures in the range of 0 鈥� 600 V bias voltage and in the temperature range of 100-300 K.

Instrument for the photo-ionization spectroscopy made at 91桃色

The instrument consists of NIR-0P range cw light source, a monochromator, a cryostat and a voltage source for biasing of the sample under investigation.

VUTEG-5 dosimeter and an instrument for the radiation defect density measurements for the control of the hadron irradiations

The instrument operates in 19 - 24 GHz microwave reflection mode.

Pulse X-band EPR spectrometer Bruker Elexsys E580

EPR spectrometer Bruker Elexsys E580 operates in a X-band (~10 GHz) range, in continuous and pulsed probing modes.

Multifunctional microscopy system:atomic force microscope (AFM), confocal and scanning near-field optical microscope (SNOM)

Multifunctional microscopy system WITec Alpha 300 enables measurements in three different modes: AFM, confocal, and SNOM.

Multichannel spectroscopy analyzer, spectral range 200-850 nm

The luminescence spectroscopy setup is used for luminescence measurements in UV-VIS spectral regions under stationary and quasi-stationary conditions, and with nanosecond time resolution.

NIR spectrometer with CCD camera and accessories, spectral range 0.8-2.2 碌m

Luminescence is dispersed using 30 cm spectrometer and analyzed using CCD camera in the spectral range of 0.8-2.2 碌m. The camera is cooled down to 鈥�90 掳C to reduce noise. CW and pulsed lasers can be used for excitation.
Spectral range of CCD 0.8-2.2 碌m.

Mechanical polisher LaboPol 鈥� 1

System uses carbide abrasives as polishing material. Polishing disc rotates at 250 RPM, sample holder rotates at 8 RPM.

Hall Effect measurement system HMS-3000

Complete system for measuring resistivity, mobility, and carrier concentration by Hall method.

Four point probe resistance measurement system with p/n typing unit for semiconductor applications (Jandel RM3000)

Primary application of the system is sheet resistance and bulk resistance measurements.

Optical poling set-up

The optical poling set-up provides creation of second order non-linear optical susceptibility gratings in a volume by mixing coherent first and second Nd:YAG laser harmonics.

Rapid thermal annealing furnace UniTemp RTP-1200-100

Furnace can reach temperatures up to 1200 掳C, furnance's chamber is vacuumable or it can be filled with nitrogen, oxygen or argon gases. Ramp up rate up to 150 K/s, chamber size is 10x100x100 mm.

Reactive ion etching equipment Oxford Instruments 100 RIE ICP-65

Equipment is suitable for mesa structures etching in semiconductor epitaxial layers.

Apollo Camscan 300 Scanning electron microscope (SEM) with Oxford Instruments X-Max energy dispersive X-ray spectrometer (EDX), and Gatan Digiscan electron beam induced current measurement setup (EBIC)

Investigation of morphology of solid state sample surface with SEM.